10kW Fully-Automatic MPCVD System

The 10kW fully automatic MPCVD (Microwave Plasma-Enhanced Chemical Vapor Deposition) system is a high-power fully automated chemical vapor deposition system used for growing crystal materials at high temperatures, widely used in the semiconductor and optoelectronic industries.

Advantages

· Fully automated operation
· Stable performance and growth environment
· New disc-shaped cavity design with high power density
· Fast deposition rate of the product
· High deposition quality
· Uniform deposition area with a diameter of up to 100mm